Plasma Etching: An Introduction (Plasma -- Materials Interactions)

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	New		3rd Party New		3rd Party Used
Latest	$72.95	Latest	$56.19	Latest	$23.13
Highest	$72.95 Dec 20, '15	Highest	$66.55 Apr 20, '14	Highest	$61.51 Mar 13, '15
Lowest	$54.48 Feb 8, '15	Lowest	$53.41 Dec 15, '15	Lowest	$12.75 Feb 7, '16
Average	$65.14	Average	$58.02	Average	$40.00
Added	Sep 18, 2013	Added	Sep 18, 2013	Added	Sep 18, 2013

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30 day average: 1,588,831 | 90 day average: 997,437

Product Description

Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.

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